Material and ultrafast optoelectronic properties of furnace-annealed arsenic-ion-implanted GaAs

被引:24
作者
Lin, GR [1 ]
Chen, WC
Chang, CS
Chao, SC
Wu, KH
Hsu, TM
Lee, WC
Pan, CL
机构
[1] Tatung Inst Technol, Inst Electroopt Engn, Taipei 104, Taiwan
[2] Natl Chiao Tung Univ, Inst Electroopt Engn, Hsinchu 30010, Taiwan
[3] Natl Chiao Tung Univ, Dept Electrophys, Hsinchu 30010, Taiwan
[4] Natl Cent Univ, Dept Phys, Chungli 32054, Taiwan
关键词
arsenic-ion-implanted GaAs; photoconductive switch; ultrafast optoelectronics;
D O I
10.1109/3.709591
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
Structural, electrical, and ultrafast optical properties of furnace-annealed arsenic-ion-implanted GaAs (GaAs:As+) has been investigated for its applications in ultrafast optoelectronics, From these studies, we determine that GaAs substrates implanted with 200-keV arsenic ions at 10(16) ions/cm(2) and furnace-annealed at 500 degrees C-600 degrees C would have recovered its crystallinity, be highly resistive, and exhibit picosecond photo-excited carrier lifetimes. The duration of the electrical pulses generated by photoconductive switches (PCS's) fabricated on the optimized material was approximate to 4 ps, The risetime (10%-90%) and 1/e falltime were, respectively, approximate to 2 and 3 ps, These results were measurement-system limited, We estimated the actual response to be approximate to 2 ps, consistent with a photo-excited carrier lifetime of approximate to 1.8 ps. The peak responsivity was greater than or equal to 4x10(-3) A/W. The dark current for the GaAs:As+ PCS biased at 40 V was as low as 5 nA. The break down field was higher than 150 kV/cm, These characteristics are comparable to those of state-of-the-art photoconductors such as LT-GaAs.
引用
收藏
页码:1740 / 1748
页数:9
相关论文
共 40 条
[1]  
[Anonymous], SEMICOND SEMIMET
[2]   LARGE ULTRAFAST OPTICAL NONLINEARITIES IN AS-RICH GAAS [J].
BENJAMIN, SD ;
OTHONOS, A ;
SMITH, PWE .
ELECTRONICS LETTERS, 1994, 30 (20) :1704-1706
[3]   A STUDY OF THE DISTRIBUTION OF HYDROGEN AND STRAIN IN PROTON-BOMBARDED LIQUID-ENCAPSULATED CZOCHRALSKI-GROWN GAAS BY DOUBLE-CRYSTAL X-RAY-DIFFRACTION AND SECONDARY ION MASS-SPECTROMETRY [J].
BROWN, GT ;
BARNETT, SJ ;
COURTNEY, SJ ;
GILL, SS .
MATERIALS SCIENCE AND ENGINEERING B-SOLID STATE MATERIALS FOR ADVANCED TECHNOLOGY, 1989, 2 (1-3) :91-97
[4]   DETECT DENSITY-MEASUREMENTS OF LOW-TEMPERATURE-GROWN MOLECULAR-BEAM EPITAXIAL GAAS BY PHOTOTHERMAL DEFECTION SPECTROSCOPY [J].
CHAN, MH ;
SO, SK ;
CHAN, KT ;
KELLERT, FG .
APPLIED PHYSICS LETTERS, 1995, 67 (06) :834-836
[5]  
Chen WC, 1996, APPL PHYS LETT, V68, P646, DOI 10.1063/1.116496
[6]   Electrical properties in arsenic-ion-implanted GaAs [J].
Chen, WC ;
Chang, CS .
JOURNAL OF APPLIED PHYSICS, 1996, 80 (03) :1600-1604
[7]   The dynamics of thermal annealing in arsenic-ion-implanted GaAs [J].
Chen, WC ;
Lin, GR ;
Chang, CS .
JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS, 1996, 35 (2B) :L192-L194
[8]   SYNTHESIS OF SEMIINSULATING GAAS BY AS IMPLANTATION AND THERMAL ANNEALING - STRUCTURAL AND ELECTRICAL-PROPERTIES [J].
CLAVERIE, A ;
FUJIOKA, H ;
LAANAB, L ;
LILIENTALWEBER, Z ;
WEBER, ER .
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1995, 96 (1-2) :327-330
[9]   FORMATION OF AS PRECIPITATES IN GAAS BY ION-IMPLANTATION AND THERMAL ANNEALING [J].
CLAVERIE, A ;
NAMAVAR, F ;
LILIENTALWEBER, Z .
APPLIED PHYSICS LETTERS, 1993, 62 (11) :1271-1273
[10]  
DONAEY FE, 1987, APPL PHYS LETT, V50, P460