The development of a "workstation" for optical testing and modification of IMEMS on a wafer

被引：18

作者：

Hedley, J ^{[1
]}

Harris, A ^{[1
]}

Burdess, J ^{[1
]}

McNie, M ^{[1
]}

机构：

[1] Univ Newcastle Upon Tyne, Dept Elect & Elect Engn, Newcastle Upon Tyne NE1 7RU, Tyne & Wear, England

来源：

DESIGN,TEST INTEGRATION, AND PACKAGING OF MEMS/MOEMS 2001 | 2001年 / 4408卷

关键词：

optical; characterisation; excitation; ablation; trimming;

D O I：

10.1117/12.425356

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

A workstation for the testing and modification of IMEMS, incorporating a laser vibrometer, surface profiler and a laser for ablation, is described. Initial results have demonstrated the ability to do dynamic and static testing rapidly at the wafer level. Electrostatic actuation is shown to be one feasible method of driving the devices on a wafer, other methods are being explored.

引用

页码：402 / 408

页数：7

共 8 条

[1] Rapid prototyping of micromechanical devices using a Q-switched Nd:YAG laser with optional frequency doubling [J].