Time evolution of nucleation and vertical growth of carbon nanotubes during plasma-enhanced chemical vapor deposition

被引：8

作者：

Jeong, GH ^{[1
]}

Satake, N

Kato, T

Hirata, T

Hatakeyama, R

Tohji, K

机构：

[1] Tohoku Univ, Dept Elect Engn, Aoba Ku, Sendai, Miyagi 9808579, Japan

[2] Tohoku Univ, Dept Geosci & Technol, Aoba Ku, Sendai, Miyagi 9808579, Japan

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS & EXPRESS LETTERS | 2003年 / 42卷 / 11A期

关键词：

carbon nanotube; plasma-enhanced chemical vapor deposition; methane-hydrogen gas mixture; time evolution; nucleation; vertical growth mechanism;

D O I：

10.1143/JJAP.42.L1340

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

We have investigated the time evolution during nanotube growth and proposed the growth mechanism in order to understand the effects of plasma proper-ties on nanotube formation and controlled growth in the case of plasma-enhanced chemical vapor deposition. The nucleation process of multi-walled carbon nanotubes (MWNTs) firstly takes place through catalyst tip formation. MWNTs grow with a wide diameter distribution at the initial growth stage and finally attain similar diameters as growth proceeds. In addition, ion flux and bombardment energy need to be optimized during the nanotube growth for vertical alignment and a highly crystallized structure.

引用

页码：L1340 / L1342

页数：3

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