Tantalum complexes with all nitrogen coordination sphere: mixed amido-, imido-, guanidinato complexes of tantalum and their thermal behaviour

被引:41
作者
Baunemann, A [1 ]
Rische, D [1 ]
Milanov, A [1 ]
Kim, Y [1 ]
Winter, M [1 ]
Gemel, C [1 ]
Fischer, RA [1 ]
机构
[1] Ruhr Univ Bochum, Lehrstuhl Anorgan Chem Organomet & Mat Chem 2, D-4630 Bochum, Germany
关键词
D O I
10.1039/b503988f
中图分类号
O61 [无机化学];
学科分类号
070301 ; 081704 ;
摘要
Novel mixed amido-/imido-/guanidinato-complexes of tantalum are reported. The complexes were synthesised by insertion reactions of carbodiimides of the type C(NR)(2) (R = iso-propyl (i-Pr)) into the M-N bonds of tantalum mixed amido/imido complexes. Three representative complexes were synthesised and fully characterised by H-1-NMR, C-13-NMR, CHN-analysis and mass spectroscopy. The crystal structure of the complex [Ta(NMe2){(i-Pr -N)(2)C(NMe2)}(2)(N-t-Bu)] (1) ( Me = methyl, t-Bu = tert-butyl) is presented and discussed. The complexes are solids that can be quantitatively sublimed at moderate temperatures ( 120 - 130 degrees C) without any sign of decomposition. The thermal properties of the new compounds were studied (TGA) and preliminary MOCVD-experiments were performed. TaN films were deposited and characterised by XRD and XPS.
引用
收藏
页码:3051 / 3055
页数:5
相关论文
共 24 条
[1]   The coordination chemistry of guanidines and guanidinates [J].
Bailey, PJ ;
Pace, S .
COORDINATION CHEMISTRY REVIEWS, 2001, 214 :91-141
[2]   Synthesis of titanium(IV) guanidinate complexes and the formation of titanium carbonitride via low-pressure chemical vapor deposition [J].
Carmalt, CJ ;
Newport, AC ;
O'Neill, SA ;
Parkin, IP ;
White, AJP ;
Williams, DJ .
INORGANIC CHEMISTRY, 2005, 44 (03) :615-619
[3]   Syntheses and characterization of organoimido complexes of tantalum; potential single-source precursors to tantalum nitride [J].
Chiu, HT ;
Chuang, SH ;
Tsai, CE ;
Lee, GH ;
Peng, SM .
POLYHEDRON, 1998, 17 (13-14) :2187-2190
[4]  
CHOI KI, 2003, P IEEE INT INT TECHN
[5]   Synthesis and characterization of niobium(IV) and tantalum(V) guanidinates and benzamidinates -: Molecular structure of the first Nb(IV) guanidinate NbCl2{CyNC(N(SiMe3)2)NCy}2 [J].
Decams, JM ;
Hubert-Pfalzgraf, LG ;
Vaissermann, J .
POLYHEDRON, 1999, 18 (22) :2885-2890
[6]   CRYSTAL-STRUCTURE OF ORTHORHOMBIC FORM OF TRICHLOROBIS-(N,N'-DIISOPROPYLACETAMIDINATO)TANTALUM(V) [J].
DREW, MGB ;
WILKINS, JD .
ACTA CRYSTALLOGRAPHICA SECTION B-STRUCTURAL SCIENCE, 1975, 31 (JAN15) :177-182
[7]   CRYSTAL AND MOLECULAR-STRUCTURE OF TRICHLOROBIS(NN'-DI-ISOPROPYLACETAMIDINATO)TANTALUM(V) [J].
DREW, MGB ;
WILKINS, JD .
JOURNAL OF THE CHEMICAL SOCIETY-DALTON TRANSACTIONS, 1974, (15) :1579-1582
[8]   Chemical vapor deposition growth and properties of TaCxNy [J].
Engbrecht, ER ;
Sun, YM ;
Smith, S ;
Pfiefer, K ;
Bennett, J ;
White, JM ;
Ekerdt, JG .
THIN SOLID FILMS, 2002, 418 (02) :145-150
[9]  
HONG JW, 2004, P IEEE INT INT TECHN
[10]  
IM SJ, 2000, MAT RES SOC S P, V612