Nano to micrometric HFCVD diamond adhesion strength to Si3N4

被引：57

作者：

Almeida, F. A. ^{[1
]}

Amaral, M.

Oliveira, F. J.

Fernandes, A. J. S.

Silva, R. F.

机构：

[1] Univ Aveiro, Dept Ceram Glass Engn, CICECO, P-3810193 Aveiro, Portugal

[2] Univ Aveiro, Dept Phys, P-3810193 Aveiro, Portugal

来源：

VACUUM | 2007年 / 81卷 / 11-12期

关键词：

CVD diamond films; silicon nitride; adhesion;

D O I：

10.1016/j.vacuum.2007.04.008

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

In the present study, hot filament chemical vapour deposition technique was used to grow diamond films from nanometric to microcrystalline grain sizes. Their adhesion levels to a silicon nitride ceramic were compared after Brale tip indentation testing. The best behaviour was attained by the microcrystalline diamond (MCD) grade due to its higher crystallinity and superior hardness. In contrast, nanocrystalline diamond (NCD) coatings showed the less effective chemical bonding to the ceramic substrate due to the higher degree of sp(2) content. The MCD coating supported a normal load of 1600 N without spalling-off and presented an interfacial crack resistance of 12.0 N mu m(-1), much better than that reported until the present. This behaviour may be attributed to the CF4 plasma pre-treatment of the substrate. (C) 2007 Elsevier Ltd. All rights reserved.

引用

页码：1443 / 1447

页数：5

共 13 条

[1] Tailored Si3N4 ceramic substrates for CVD diamond coating [J].

Amaral, M ;

Oliveira, FJ ;

Belmonte, M ;

Fernandes, AJS ;

Costa, FM ;

Silva, RF .

SURFACE ENGINEERING, 2003, 19 (06) :410-416

[2] Adhesion behaviour assessment on diamond coated silicon nitride by acoustic emission [J].

Belmonte, M ;

Fernandes, AJS ;

Costa, FM ;

Oliveira, FJ ;

Silva, RF .

[3] RAMAN AND PHOTOLUMINESCENCE ANALYSIS OF STRESS STATE AND IMPURITY DISTRIBUTION IN DIAMOND THIN-FILMS [J].

BERGMAN, L ;

NEMANICH, RJ .

JOURNAL OF APPLIED PHYSICS, 1995, 78 (11) :6709-6719

[4]

Brühne K, 2005, REV ADV MATER SCI, V10, P224

[5] Deposition of ballas diamond and nano-crystalline diamond [J].

Haubner, R ;

Lux, B .

INTERNATIONAL JOURNAL OF REFRACTORY METALS & HARD MATERIALS, 2002, 20 (02) :93-100

[6]

Mallika K, 2001, THIN SOLID FILMS, V396, P145, DOI 10.1016/S0040-6090(01)01262-7

[7] MEASUREMENT OF ADHERENCE OF RESIDUALLY STRESSED THIN-FILMS BY INDENTATION .1. MECHANICS OF INTERFACE DELAMINATION [J].

MARSHALL, DB ;

EVANS, AG .

JOURNAL OF APPLIED PHYSICS, 1984, 56 (10) :2632-2638

[8] Adhesion of diamond coatings on cemented carbides [J].

Nesladek, M ;

Vandierendonck, K ;

Quaeyhaegens, C ;

Kerkhofs, M ;

Stals, LM .

THIN SOLID FILMS, 1995, 270 (1-2) :184-188

[9] Mechanical wear behavior of nanocrystalline and multilayer diamond coatings on temporomandibular joint implants [J].

Papo, MJ ;

Catledge, SA ;

Vohra, YK .

JOURNAL OF MATERIALS SCIENCE-MATERIALS IN MEDICINE, 2004, 15 (07) :773-777

[10] DIAMOND DEPOSITION ON STEEL WITH CVD TUNGSTEN INTERMEDIATE LAYER [J].

RALCHENKO, VG ;

SMOLIN, AA ;

PEREVERZEV, VG ;

OBRAZTSOVA, ED ;

KOROTOUSHENKO, KG ;

KONOV, VI ;

LAKHOTKIN, YV ;

LOUBNIN, EN .

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