Direct nanolithography of organic polysilane films using carbon nanotube tips

被引：11

作者：

Okazaki, A ^{[1
]}

Kishida, T ^{[1
]}

Akita, S ^{[1
]}

Nishijima, H ^{[1
]}

Nakayama, Y ^{[1
]}

机构：

[1] Univ Osaka Prefecture, Dept Phys & Elect, Osaka 5998531, Japan

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS | 2000年 / 39卷 / 12B期

关键词：

carbon nanotube; SPM tip; polysilane; lithography;

D O I：

10.1143/JJAP.39.7067

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

Nanolithography of polysilane films is performed by means of a tapping-mode-scanning probe microscope (SPM) equipped with a carbon nanotube tip. The tapping mode enables us to perform finer lithography than that by the contact mode. Electrons injected from the tip directly groove the polysilane film. A constant current operation is more stable in the tapping-mode lithography than a constant bias voltage operation. The mechanism of direct lithography is discussed on the basis of the model that the excess electrons in the Si backbone break Si-Si bonds.

引用

页码：7067 / 7069

页数：3

共 13 条

[1] Influence of the water layer on the shear force damping in near-field microscopy [J].

Davy, S ;

Spajer, M ;

Courjon, D .

APPLIED PHYSICS LETTERS, 1998, 73 (18) :2594-2596

[2] SUB-30-NM LITHOGRAPHY IN A NEGATIVE ELECTRON-BEAM RESIST WITH A VACUUM SCANNING TUNNELING MICROSCOPE [J].

DOBISZ, EA ;

MARRIAN, CRK .

APPLIED PHYSICS LETTERS, 1991, 58 (22) :2526-2528

[3] Characterization of scanning tunneling microscopy and atomic force microscopy-based techniques for nanolithography on hydrogen-passivated silicon [J].

Fontaine, PA ;

Dubois, E ;

Stievenard, D .

JOURNAL OF APPLIED PHYSICS, 1998, 84 (04) :1776-1781

[4] SCANNING-TUNNELING-MICROSCOPY BASED LITHOGRAPHY EMPLOYING AMORPHOUS HYDROGENATED CARBON AS A HIGH-RESOLUTION RESIST MASK [J].

KRAGLER, K ;

GUNTHER, E ;

LEUSCHNER, R ;

FALK, G ;

HAMMERSCHMIDT, A ;

VONSEGGEM, H ;

SAEMANNISCHENKO, G .

APPLIED PHYSICS LETTERS, 1995, 67 (08) :1163-1165

[5] NANOMETER-SCALE LITHOGRAPHY USING THE ATOMIC FORCE MICROSCOPE [J].

MAJUMDAR, A ;

ODEN, PI ;

CARREJO, JP ;

NAGAHARA, LA ;

GRAHAM, JJ ;

ALEXANDER, J .

APPLIED PHYSICS LETTERS, 1992, 61 (19) :2293-2295

[6] ELECTRON-BEAM LITHOGRAPHY WITH THE SCANNING TUNNELING MICROSCOPE [J].

MARRIAN, CRK ;

DOBISZ, EA ;

DAGATA, JA .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1992, 10 (06) :2877-2881

[7] LITHOGRAPHY WITH THE SCANNING TUNNELING MICROSCOPE [J].

MCCORD, MA ;

PEASE, RFW .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1986, 4 (01) :86-88

[8]

MILLER RD, 1989, CHEM REV, V89, pL49

[9] Carbon-nanotube tips for scanning probe microscopy: Preparation by a controlled process and observation of deoxyribonucleic acid [J].

Nishijima, H ;

Kamo, S ;

Akita, S ;

Nakayama, Y ;

Hohmura, KI ;

Yoshimura, SH ;

Takeyasu, K .

APPLIED PHYSICS LETTERS, 1999, 74 (26) :4061-4063

[10] Novel process for fabricating nanodevices consisting of carbon nanotubes [J].

Nishijima, H ;

Akita, S ;

Nakayama, Y .

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS, 1999, 38 (12B) :7247-7252

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