Fabrication of high-packing-density vertical cavity surface-emitting laser arrays using selective oxidation

被引：10

作者：

Huffaker, DL

Graham, LA

Deppe, DG

机构：

[1] Microelectronics Research Center, Dept. of Elec. and Comp. Engineering, University of Texas at Austin, Austin

来源：

IEEE PHOTONICS TECHNOLOGY LETTERS | 1996年 / 8卷 / 05期

关键词：

D O I：

10.1109/68.491550

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

We describe the nearly-planar processing of two-dimensional vertical cavity laser arrays based on the selective conversion of AlAs to AlxOy. The individual lasers of 8 x 8 and 2 x 2 arrays are defined by native AlxOy to achieve 4-mu m square active regions on 12-mu m center-to-center spacings, Interelement thermal coupling is characterized along with the optical mode structure.

引用

页码：596 / 598

页数：3

共 20 条

[1] CAVITY CHARACTERISTICS OF SELECTIVELY OXIDIZED VERTICAL-CAVITY LASERS [J].

CHOQUETTE, KD ;

LEAR, KL ;

SCHNEIDER, RP ;

GEIB, KM .

APPLIED PHYSICS LETTERS, 1995, 66 (25) :3413-3415

[2]

DALLESASSE JM, 1990, APPL PHYS LETT, V63, P1660

[3] TEMPERATURE-DEPENDENCE OF THE TRANSVERSE LASING MODE IN VERTICAL-CAVITY LASERS [J].

DENG, H ;

LIN, CC ;

HUFFAKER, DL ;

DENG, Q ;

DEPPE, DG ;

ROGERS, TJ .

JOURNAL OF APPLIED PHYSICS, 1995, 77 (06) :2279-2286

[4] PHASE-COUPLED 2-DIMENSIONAL ALXGA1-XAS-GAAS VERTICAL-CAVITY SURFACE-EMITTING LASER ARRAY [J].

DEPPE, DG ;

VANDERZIEL, JP ;

CHAND, N ;

ZYDZIK, GJ ;

CHU, SNG .

APPLIED PHYSICS LETTERS, 1990, 56 (21) :2089-2091

[5] VERY-LOW-THRESHOLD INDEX-CONFINED PLANAR MICROCAVITY LASERS [J].

DEPPE, DG ;

HUFFAKER, DL ;

SHIN, J ;

DENG, Q .

IEEE PHOTONICS TECHNOLOGY LETTERS, 1995, 7 (09) :965-967

[6] SUBMILLIAMP THRESHOLD VERTICAL-CAVITY LASER-DIODES [J].

GEELS, RS ;

COLDREN, LA .

APPLIED PHYSICS LETTERS, 1990, 57 (16) :1605-1607

[7] LASING CHARACTERISTICS OF LOW-THRESHOLD MICROCAVITY LASERS USING HALF-WAVE SPACER LAYERS AND LATERAL INDEX CONFINEMENT [J].

HUFFAKER, DL ;

SHIN, J ;

DEPPE, DG .

APPLIED PHYSICS LETTERS, 1995, 66 (14) :1723-1725

[8] TRANSVERSE-MODE BEHAVIOR IN NATIVE-OXIDE-DEFINED LOW-THRESHOLD VERTICAL-CAVITY LASERS [J].

HUFFAKER, DL ;

DEPPE, DG ;

ROGERS, TJ .

APPLIED PHYSICS LETTERS, 1994, 65 (13) :1611-1613

[9] NATIVE-OXIDE DEFINED RING CONTACT FOR LOW-THRESHOLD VERTICAL-CAVITY LASERS [J].

HUFFAKER, DL ;

DEPPE, DG ;

KUMAR, K ;

ROGERS, TJ .

APPLIED PHYSICS LETTERS, 1994, 65 (01) :97-99

[10] IMPROVED MODE-STABILITY IN LOW-THRESHOLD SINGLE-QUANTUM-WELL NATIVE-OXIDE DEFINED VERTICAL-CAVITY LASERS [J].

HUFFAKER, DL ;

SHIN, J ;

DENG, H ;

LIN, CC ;

DEPPE, DG ;

STREETMAN, BG .

APPLIED PHYSICS LETTERS, 1994, 65 (21) :2642-2644

← 1 2 →