X-ray microfabrication of multi-level structures and 3-D patterning

被引：4

作者：

Morris, KJ

Vladimirsky, Y

Vladimirsky, O

Calderon, G

机构：

[1] Ctr. Adv. Microstructures Devices, Louisiana State University, Baton Rouge

[2] Center for X-ray Lithography, University of Wisconsin-Madison, Staughton

来源：

MICROELECTRONIC ENGINEERING | 1997年 / 35卷 / 1-4期

关键词：

D O I：

10.1016/S0167-9317(96)00153-0

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

Preliminary results of a novel technique for producing true three-dimensional patterns in thick resists are presented in this work.

引用

页码：545 / 548

页数：4

共 11 条

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