Effect of base layers on the soft magnetic properties of FeTaN films

被引：11

作者：

Inturi, VR ^{[1
]}

Barnard, JA ^{[1
]}

机构：

[1] UNIV ALABAMA, CTR MAT INFORMAT TECHNOL, TUSCALOOSA, AL 35487 USA

来源：

JOURNAL OF APPLIED PHYSICS | 1996年 / 79卷 / 08期

关键词：

D O I：

10.1063/1.362167

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

The effects of base layers with different crystal structures and well defined growth textures on the soft magnetic properties of FeTaN films have been studied. Broadly speaking, base layers with fee or hcp crystal structures and having predominantly (111) and (0002) growth textures, respectively, significantly improve the soft magnetic properties of the subsequently deposited (110) textured bce FeTaN films. Base layers with bce crystal structures and (110) growth textures either degrade the soft magnetic properties or have little effect. (C) 1996 American Institute of Physics.

引用

页码：5904 / 5906

页数：3

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