Low noise AlGaN metal-semiconductor-metal photodiodes

被引:13
作者
Monroy, E
Calle, F
Muñoz, E
Omnès, F
Gibart, P
机构
[1] Univ Politecn Madrid, ETSI Telecomun, Dept Ingn Elect, Madrid 28040, Spain
[2] CNRS, CRHEA, F-06560 Valbonne, France
关键词
D O I
10.1049/el:19990153
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
AlGaN metal-semiconductor-metal photodiodes with a sharp cutoff wavelength as short as 310nm are reported for the first time. The devices show a low dark current, < 0.3 mu A at 40V. The responsivity is flat over the bandgap, with a high visible rejection. At 28V bias, the noise equivalent power is lower than 17pW/Hz(1/2) and similar to 24 pW/Hz(1/2) in GaN and Al0.25Ga0.75N photodiodes, respectively.
引用
收藏
页码:240 / 241
页数:2
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