Characteristics of ZnO:Ga thin films prepared by chemical spray using two different Zn and Ga precursors

被引:18
作者
Olvera, MD [1 ]
Maldonado, A [1 ]
机构
[1] Inst Politecn Nacl, CINVESTAV, Dept Ingn Elect SEES, Mexico City 07000, DF, Mexico
来源
PHYSICA STATUS SOLIDI A-APPLICATIONS AND MATERIALS SCIENCE | 2003年 / 196卷 / 02期
关键词
D O I
10.1002/pssa.200305960
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
Homogeneous, pinhole free, high quality and reproducible gallium-doped zinc oxide, ZnO : Ga, thin films were deposited by the chemical spray technique. The electrical, structural, morphological and optical properties of films grown from two different Zn and Ga sources were analyzed. ZnO : Ga films were deposited onto heated soda-lime glass substrates at temperatures between 450-525 degreesC. A resistivity decrease of one order of magnitude was registered after a vacuum thermal process, reaching a minimum value of 4.5 x 0(-3) Omega cm for films deposited at 500 degreesC. Preferential growth orientation was dependent on the Ga source. (101) planes were mainly observed in films deposited from both Zn sources and Ga pentanedionate as dopant, while (002) planes were preferred when Ga nitrate was used. A valuation of grain size and crystallite size from scanning electron microscopy micrographs and X-ray spectra, respectively, was performed. Average optical transmittance in the visible region was of the order of 85%.
引用
收藏
页码:410 / 415
页数:6
相关论文
共 23 条
[1]   OPTICAL AND ELECTRICAL-PROPERTIES OF ZNO FILMS PREPARED BY SPRAY PYROLYSIS FOR SOLAR-CELL APPLICATIONS [J].
ARANOVICH, J ;
ORTIZ, A ;
BUBE, RH .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1979, 16 (04) :994-1003
[2]   TRANSPARENT CONDUCTORS - A STATUS REVIEW [J].
CHOPRA, KL ;
MAJOR, S ;
PANDYA, DK .
THIN SOLID FILMS, 1983, 102 (01) :1-46
[3]  
DUTTA A, 1995, J MATER SCI, V6, P15
[4]   Sol-gel preparation of highly oriented gallium-doped zinc oxide thin films [J].
Fathollahi, V ;
Amini, MM .
MATERIALS LETTERS, 2001, 50 (04) :235-239
[5]   ANNEALING EFFECTS IN INDIUM OXIDE-FILMS PREPARED BY REACTIVE EVAPORATION [J].
GUPTA, A ;
GUPTA, P ;
SRIVASTAVA, VK .
THIN SOLID FILMS, 1985, 123 (04) :325-331
[6]   ZINC-OXIDE THIN-FILM SURFACE-WAVE TRANSDUCERS [J].
HICKERNELL, FS .
PROCEEDINGS OF THE IEEE, 1976, 64 (05) :631-635
[7]   Characteristics of spray pyrolytic ZnO thin films [J].
Lee, CH ;
Lin, LY .
APPLIED SURFACE SCIENCE, 1996, 92 :163-166
[8]   The effects of thermal annealing on ZnO thin films grown by pulsed laser deposition [J].
Lu, YF ;
Ni, HQ ;
Mai, ZH ;
Ren, ZM .
JOURNAL OF APPLIED PHYSICS, 2000, 88 (01) :498-502
[9]   PREPARATION AND CHARACTERIZATION OF ZNO FILMS BY AN EVAPORATING METHOD [J].
MA, J ;
JI, F ;
MA, HL ;
LI, SY .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1995, 13 (01) :92-94
[10]   THICKNESS-DEPENDENT PROPERTIES OF INDIUM-DOPED ZNO FILMS [J].
MAJOR, S ;
BANERJEE, A ;
CHOPRA, KL ;
NAGPAL, KC .
THIN SOLID FILMS, 1986, 143 (01) :19-30