Direct writing of patterned ceramics using electron-beam lithography and metallopolymer resists

被引：73

作者：

Clendenning, SB

Aouba, S

Rayat, MS

Grozea, D

Sorge, JB

Brodersen, PM

Sodhi, RNS

Lu, ZH

Yip, CM

Freeman, MR

Ruda, HE ^{[1
]}

Manners, I

机构：

[1] Univ Toronto, Ctr Adv Nanotechnol, Toronto, ON M5S 3E4, Canada

[2] Univ Toronto, Dept Chem, Toronto, ON M5S 3H6, Canada

[3] Univ Toronto, Dept Mat Sci & Engn, Toronto, ON M5S 3E4, Canada

[4] Univ Toronto, Inst Biomat & Biomed Engn, Dept Chem Engn & Appl Chem, Toronto, ON M5S 3G9, Canada

[5] Univ Alberta, Dept Phys, Edmonton, AB T6G 2J1, Canada

[6] Univ Toronto, Dept Chem Engn & Appl Chem, Surface Interface Ontario, Toronto, ON M5S 3E5, Canada

来源：

ADVANCED MATERIALS | 2004年 / 16卷 / 03期

关键词：

D O I：

10.1002/adma.200305740

中图分类号：

O6 [化学];

学科分类号：

0703 ;

摘要：

Patterned arrays of ceramics have been fabricated using electron-beam lithography (EBL) and a metallopolymer resist. Highly ordered arrays of dots, bars (see scanning electron microscopy and time-of-flight secondary ion mass spectrometry images in the Figure), and curved lines rich in Fe and Co are direct-written on films of a highly metallized cobalt-clusterized polyferrocenylsilane. Subsequent pyrolysis leads to ferromagnetic ceramics.

引用

收藏

页码：215 / +

页数：6

相关论文

共 33 条

[1] 100-nm lateral size ferroelectric memory cells fabricated by electron-beam direct writing [J].

Alexe, M ;

Harnagea, C ;

Erfurth, W ;

Hesse, D ;

Gösele, U .

APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING, 2000, 70 (03) :247-251

[2] Electron beam lithography in passivated gold nanoclusters [J].

Bedson, TR ;

Palmer, RE ;

Wilcoxon, JP .

MICROELECTRONIC ENGINEERING, 2001, 57-8 :837-841

[3] Ceramics containing magnetic co-fe alloy nanoparticles from the pyrolysis of a highly metallized organometallic polymer precursor [J].

Berenbaum, A ;

Ginzburg-Margau, M ;

Coombs, N ;

Lough, AJ ;

Safa-Sefat, A ;

Greedan, JE ;

Ozin, GA ;

Manners, I .

ADVANCED MATERIALS, 2003, 15 (01) :51-+

[4] The production of fine metal tracks from a new range of organometallic compounds [J].

Berry, GJ ;

Cairns, JA ;

Thomson, J .

SENSORS AND ACTUATORS A-PHYSICAL, 1995, 51 (01) :47-50

[5] Room temperature magnetic quantum cellular automata [J].

Cowburn, RP ;

Welland, ME .

SCIENCE, 2000, 287 (5457) :1466-1468

[6] METAL-DEPOSITION BY ELECTRON-BEAM EXPOSURE OF AN ORGANOMETALLIC FILM [J].

CRAIGHEAD, HG ;

SCHIAVONE, LM .

APPLIED PHYSICS LETTERS, 1986, 48 (25) :1748-1750

[7] Direct writing of metallic nanostructures by means of metal colloids [J].

Dumpich, G ;

Lohau, J ;

Wassermann, EF ;

Winter, M ;

Reetz, MT .

TRENDS AND NEW APPLICATIONS OF THIN FILMS, 1998, 287-2 :413-415

[8]

FUJITA J, 1995, APPL PHYS LETT, V66, P3064

[9] Genesis of nanostructured, magnetically tunable ceramics from the pyrolysis of cross-linked polyferrocenylsilane networks and formation of shaped macroscopic objects and micron scale patterns by micromolding inside silicon wafers [J].

Ginzburg, M ;

MacLachlan, MJ ;

Yang, SM ;

Coombs, N ;

Coyle, TW ;

Raju, NP ;

Greedan, JE ;

Herber, RH ;

Ozin, GA ;

Manners, I .

JOURNAL OF THE AMERICAN CHEMICAL SOCIETY, 2002, 124 (11) :2625-2639

[10]

Gonsalves KE, 2001, ADV MATER, V13, P703, DOI 10.1002/1521-4095(200105)13:10<703::AID-ADMA703>3.0.CO

← 1 2 3 4 →