Fabrication and transfer of nanoporous alumina thin films for templating applications: Metal dots array deposition and porous ZnO film growth

被引：15

作者：

Liu, H. F. ^{[1
]}

Lim, E. S. ^{[2
]}

Tung, P. K. H. ^{[2
]}

Xiang, N. ^{[2
]}

机构：

[1] ASTAR, IMRE, Singapore 117602, Singapore

[2] Natl Univ Singapore, Dept Elect & Comp Engn, Ctr Optoelect, Singapore 117576, Singapore

来源：

THIN SOLID FILMS | 2011年 / 519卷 / 10期

关键词：

Aluminum Anodic Films; Lift-off; Bonding; Metal dots array; Zinc Oxide; Hydrothermal deposition; Scanning Electron Microscopy; X-ray diffraction; EVAPORATION MASK; LIFT-OFF; NANOPARTICLES; NANORODS; NANODOTS; SENSORS; SILICON;

D O I：

10.1016/j.tsf.2010.12.023

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

An approach to fabricate nanoporous alumina thin films on aluminum foils followed by their transfer to desired substrates via chemical lift-off and Van der Waals bonding is presented. By employing a black wax technique, we demonstrate a crack free (within the area of 2x2 cm(2)) lift-off and bonding of a nanoporous alumina film with thickness of as small as similar to 300 nm onto a substrate. The liftoff-and-bonding process changes neither the morphology nor the structure of the nanopores in the alumina film. Templating applications of the bonded alumina thin films are demonstrated and discussed. The results reveal that the alumina nanopores, combined with the liftoff-and-bonding technique, have great potential for templating applications in both nano-sized dots array deposition and functional materials growth. (C) 2010 Elsevier B.V. All rights reserved.

引用

页码：3050 / 3054

页数：5

共 20 条

[1] Highly Ordered Nanoporous Alumina on Conducting Substrates with Adhesion Enhanced by Surface Modification: Universal Templates for Ultrahigh-Density Arrays of Nanorods [J].