Coaxial impact-collision ion scattering spectroscopy and time-of-flight elastic recoil detection analysis for in situ monitoring of surface processes in gas phase atmosphere

被引：9

作者：

Katayama, M

Fujino, T

Yamazaki, Y

Inoue, S

Ryu, JT

Oura, K

机构：

[1] Osaka Univ, Grad Sch Engn, Dept Elect Engn, Suita, Osaka 5650871, Japan

[2] Taegu Univ, Fac Comp & Commun Engn, Kyungsan 712714, Kyungbuk, South Korea

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS | 2001年 / 40卷 / 6A期

关键词：

ion scattering spectroscopy; elastic recoil detection analysis; silicon; germanium; hydrogen surfactant;

D O I：

10.1143/JJAP.40.L576

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

Based on conventional coaxial impact-collision ion scattering spectroscopy (CAICISS) and time-of-flight elastic recoil detection analysis (TOF-ERDA), we have developed a novel ion scattering and recoiling spectrometer equipped with a differential pumping system for in situ monitoring of surface processes in gas phase atmosphere in the pressure regime up to 10(-4) Torr. In order to demonstrate the performance of this apparatus, we have applied it to real-time monitoring of Ge thin film growth on a Si(001) surface in atomic hydrogen (H) atmosphere. The morphology of Ge thin films and H coverage on the growth front during the growth in H atmosphere were successfully observed.

引用

收藏

页码：L576 / L579

页数：4

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