Effects produced by metal-coated near-field probes on the performance of silicon waveguides and resonators

被引：10

作者：

Abashin, Maxim ^{[1
]}

Levy, Uriel ^{[1
]}

Ikeda, Kazuhiro ^{[1
]}

Fainman, Yeshaiahu ^{[1
]}

机构：

[1] Univ Calif San Diego, Dept Elect & Comp Engn, La Jolla, CA 92093 USA

来源：

OPTICS LETTERS | 2007年 / 32卷 / 17期

关键词：

OPTICAL MICROSCOPE; MODES;

D O I：

10.1364/OL.32.002602

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

We study the effects of metal-coated fiber near-field probes on the performance of nanophotonic devices. Employing a heterodyne near-field scanning optical microscope and analyzing transmission characteristics, we find that a metal-coated probe can typically introduce a 3 dB intensity loss and a 0.2 rad phase shift during characterization of a straight waveguide made in a silicon-on-insulator system. In resonant nanophotonic structures such as a 5 mu m radius microring resonator, we demonstrate that the probe induces a 1 nm shift in resonant wavelength and decreases the resonator quality factor, Q, from 1100 to 480. (c) 2007 Optical Society of America.

引用

页码：2602 / 2604

页数：3

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