High speed silicon Mach-Zehnder modulator

被引:427
作者
Liao, L
Samara-Rubio, D
Morse, M
Liu, AS
Hodge, D
Rubin, D
Keil, UD
Franck, T
机构
[1] Intel Corp, Santa Clara, CA 95054 USA
[2] Intel Corp, IL-91031 Jerusalem, Israel
[3] Intel Copenhagen, DK-2740 Skovlund, Denmark
来源
OPTICS EXPRESS | 2005年 / 13卷 / 08期
关键词
D O I
10.1364/OPEX.13.003129
中图分类号
O43 [光学];
学科分类号
070207 ; 0803 ;
摘要
We demonstrate a silicon modulator with an intrinsic bandwidth of 10 GHz and data transmission from 6 Gbps to 10 Gbps. Such unprecedented bandwidth performance in silicon is achieved through improvements in material quality, device design, and driver circuitry. (C) 2005 Optical Society of America.
引用
收藏
页码:3129 / 3135
页数:7
相关论文
共 20 条
[1]   Nanotaper for compact mode conversion [J].
Almeida, VR ;
Panepucci, RR ;
Lipson, M .
OPTICS LETTERS, 2003, 28 (15) :1302-1304
[2]   HIGH-PERFORMANCE MACH-ZEHNDER MODULATORS IN MULTIPLE-QUANTUM-WELL GAAS/ALGAAS [J].
CITES, JS ;
ASHLEY, PR .
JOURNAL OF LIGHTWAVE TECHNOLOGY, 1994, 12 (07) :1167-1173
[3]   CMOS compatible fully integrated Mach-Zehnder interferometer in SOI technology [J].
Dainesi, P ;
Küng, A ;
Chabloz, M ;
Lagos, A ;
Flückiger, P ;
Ionescu, A ;
Fazan, P ;
Declerq, M ;
Renaud, P ;
Robert, P .
IEEE PHOTONICS TECHNOLOGY LETTERS, 2000, 12 (06) :660-662
[4]   Fabrication and analysis of high-contrast InGaAsP-InP Mach-Zehnder modulators for use at 1.55-mu m wavelength [J].
Fetterman, M ;
Chao, CP ;
Forrest, SR .
IEEE PHOTONICS TECHNOLOGY LETTERS, 1996, 8 (01) :69-71
[5]  
GEIS MW, 2004, INTEGRATED PHOTONICS
[6]   Fully packaged, broad-band LiNbO3 modulator with low drive voltage [J].
Howerton, MM ;
Moeller, RP ;
Greenblatt, AS ;
Krähenbühl, R .
IEEE PHOTONICS TECHNOLOGY LETTERS, 2000, 12 (07) :792-794
[7]   Ultra-high-speed multiple-quantum-well electro-absorption optical modulators with integrated waveguides [J].
Ido, T ;
Tanaka, S ;
Suzuki, M ;
Koizumi, M ;
Sano, H ;
Inoue, H .
JOURNAL OF LIGHTWAVE TECHNOLOGY, 1996, 14 (09) :2026-2034
[8]   Optical transmission losses in polycrystalline silicon strip waveguides: Effects of waveguide dimensions, thermal treatment, hydrogen passivation, and wavelength [J].
Liao, L ;
Lim, DR ;
Agarwal, AM ;
Duan, XM ;
Lee, KK ;
Kimerling, LC .
JOURNAL OF ELECTRONIC MATERIALS, 2000, 29 (12) :1380-1386
[9]   Phase modulation efficiency and transmission loss of silicon optical phase shifters [J].
Liao, L ;
Liu, AS ;
Jones, R ;
Rubin, D ;
Samara-Rubio, D ;
Cohen, O ;
Salib, M ;
Paniccia, M .
IEEE JOURNAL OF QUANTUM ELECTRONICS, 2005, 41 (02) :250-257
[10]   Scaling the modulation bandwidth and phase efficiency of a silicon optical modulator [J].
Liu, A ;
Samara-Rubio, D ;
Liao, L ;
Paniccia, M .
IEEE JOURNAL OF SELECTED TOPICS IN QUANTUM ELECTRONICS, 2005, 11 (02) :367-372