Electrical properties of lightly doped p-type silicon-germanium single crystals

被引:36
作者
Gaworzewski, P
Tittelbach-Helmrich, K
Penner, U
Abrosimov, NV
机构
[1] Inst Semicond Phys, D-15230 Frankfurt, Germany
[2] Inst Crystal Growth, D-12489 Berlin, Germany
关键词
D O I
10.1063/1.367348
中图分类号
O59 [应用物理学];
学科分类号
摘要
Experimental results are presented on the electrical properties of lightly baron doped bulk Si1-xGex as a function of the Ge content x in the range 0<x<0.13. Calculations of the hole mobility in Si and in Si1-xGex and comparison with experimental results allow us to estimate the averaged scattering potential of the randomly distributed Ge atoms to be 0.55 eV. From Hall effect and capacitance-voltage measurements, a Hall factor around 0.8 at T=300 K is derived. Hall effect measurements in the temperature range 20-300 K enable us to determine the boron acceptor activation energy, which decreases from 45 meV at x=0 down to 32 meV for x=0.13, and to estimate the hole effective masses to be m(eff)/m(0) approximate to 0.45. (C) 1998 American Institute of Physics.
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页码:5258 / 5263
页数:6
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