Self diffusion in SiC: the role of intrinsic point defects

被引:37
作者
Mattausch, A [1 ]
Bockstedte, M [1 ]
Pankratov, O [1 ]
机构
[1] Univ Erlangen Nurnberg, Lehrstuhl Theor Festkorperphys, DE-91058 Erlangen, Germany
来源
SILICON CARBIDE AND RELATED MATERIALS, ECSCRM2000 | 2001年 / 353-356卷
关键词
ab initio defect-energetics; defect complexes; point defects; self-diffusion;
D O I
10.4028/www.scientific.net/MSF.353-356.323
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
We apply an ab initio method to study the diffusion of intrinsic interstitials and vacancies in 3C-SiC. The structure and the energetics of the relevant transient complexes are calculated. We present possible migration paths and the corresponding barriers and discuss the dominant channels for self-diffusion.
引用
收藏
页码:323 / 326
页数:4
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