Diameter-controlled growth of carbon nanotubes using thermal chemical vapor deposition

被引：84

作者：

Lee, CJ ^{[1
]}

Lyu, SC

Cho, YR

Lee, JH

Cho, KI

机构：

[1] Kunsan Natl Univ, Sch Elect Engn, Kunsan 573701, South Korea

[2] ETRI, Microelect Labs, Next Generat Semicond Res Dept, Taejon 305350, South Korea

来源：

CHEMICAL PHYSICS LETTERS | 2001年 / 341卷 / 3-4期

关键词：

D O I：

10.1016/S0009-2614(01)00481-X

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

The diameter and the growth rate of vertically aligned carbon nanotubes (CNTs) are controlled by modulating the size of catalytic particles using thermal chemical vapor deposition (CVD). The size of iron catalytic particles deposited on silicon oxide substrate is varied in a controlled manner by adjusting the condition of ammonia pretreatment. We found an inverse relation between the diameter and growth rate of carbon nanotubes. As the diameter increases, the compartment layers of bamboo-shaped carbon nanotubes appear more frequently. which is suitably explained by the base growth mechanism. (C) 2001 Elsevier Science B.V. All rights reserved.

引用

页码：245 / 249

页数：5

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