Influence of buffer layers on lead magnesium niobate titanate thin films prepared by pulsed laser ablation

被引：25

作者：

Nakamura, T ^{[1
]}

Masuda, A ^{[1
]}

Morimoto, A ^{[1
]}

Shimizu, T ^{[1
]}

机构：

[1] KANAZAWA UNIV,FAC ENGN,DEPT ELECT & COMP ENGN,KANAZAWA,ISHIKAWA 920,JAPAN

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS | 1996年 / 35卷 / 9A期

关键词：

thin film; lead magnesium niobate titanate (PMN-PT); buffer layer; lead titanate; barium titanate; barium strontium titanate; pulsed laser ablation;

D O I：

10.1143/JJAP.35.4750

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

Lead magnesium niobate titanate (Pb[(Mg1/3Nb2/3)(0.9)Ti-0.1]O-3; PMN-PT) thin films were prepared on Pt/Ti/SiO2/Si substrates with buffer layers by pulsed laser ablation (PLA). Lead titanate (PT), barium titanate (BT) and barium strontium titanate (BST) were chosen as the materials of the buffer layer. The crystalline structure of the PMN-PT thin films on the buffer layers was a mixture of perovskite and pyrochlore phases. Among these samples, the PMN-PT thin films on the BST buffer layer have the highest perovskite fraction of over 95%. Average dielectric constant of the PMN-PT thin film on the BST buffer layer was about 1200. No serious interdiffusions between the bottom electrode, the buffer layer and the PMN-PT layers were observed.

引用

页码：4750 / 4754

页数：5

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