Self-assembled InAs quantum-dot chains on self-formed GaAs mesa-stripes by molecular beam epitaxy

被引:6
作者
Kanto, T [1 ]
Yamaguchi, K [1 ]
机构
[1] Univ Electrocommun, Dept Elect Engn, Chofu, Tokyo 1828285, Japan
来源
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS | 2005年 / 44卷 / 10期
关键词
InAs; quantum-dot chain; molecular beam epitaxy; strain control; misfit dislocation; mesa stripe; InGaAs; GaAs;
D O I
10.1143/JJAP.44.7690
中图分类号
O59 [应用物理学];
学科分类号
摘要
The self-formation of InAs quantum-dot chains (QDCs) was demonstrated on GaAs/InGaAs/GaAs(001) layers by molecular beam epitaxy (MBE). In the MBE growth of a GaAs layer on a corrugated InGaAs/GaAs buffer layer, mesa-stripe structures with the {211}A side wall were spontaneously formed along the [1101 direction. InAs QDCs were formed on the GaAs mesa stripes along the [110] direction. In particular, uniform InAs QDCs were fabricated on the vicinal GaAs(001) substrate, misoriented toward the [110] direction. The self-formation of QDCs was attributed to the misfit dislocation and step structure.
引用
收藏
页码:7690 / 7693
页数:4
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