Comparative study of residual stresses measurement methods on CVD diamond films

被引：38

作者：

Kim, JG ^{[1
]}

Yu, J ^{[1
]}

机构：

[1] Korea Adv Inst Sci & Technol, Dept Mat Sci & Engn, Taejon, South Korea

来源：

SCRIPTA MATERIALIA | 1998年 / 39卷 / 06期

关键词：

D O I：

10.1016/S1359-6462(98)00182-1

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

[No abstract available]

引用

页码：807 / 814

页数：8

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