Effects of pressure on PbTiO3 thin film prepared by low-pressure thermal plasma deposition

被引:1
作者
Nagata, S [1 ]
Wakiya, N
Shinozaki, K
Masuda, Y
Mizutani, N
机构
[1] Tokyo Inst Technol, Fac Engn, Dept Inorgan Mat, Tokyo 1528552, Japan
[2] Int Superconduct Technol Ctr, Superconduct Res Lab, Tokyo 1350062, Japan
关键词
lead titanate; low-pressure thermal plasma; thin film; mist; alkoxide; microstructure; hysteresis;
D O I
10.2320/jinstmet1952.63.1_62
中图分类号
TF [冶金工业];
学科分类号
0806 ;
摘要
PbTiO3 thin films were prepared by low-pressure thermal plasma deposition method on (100)MgO substrates. The mists of the mixed solution of each metal alkoxides and 2-methoxyethanol were introduced into a plasma flame and deposited onto substrates. The constituent phases, the crystal texture and the surface morphology were drastically changed by the chamber pressure. Over 13332 Pa, single phase PbTiO3 films were obtained. They were grown epitaxially and their surface morphology was composed of rectangular shaped grains. The remnant polarization and coercive field of the film from the hysteresis loop were about 0.10 C . m(-2) and 5.12 MV . m(-1), respectively.
引用
收藏
页码:62 / 67
页数:6
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