Diffusion and evolution of hydrogen in hydrogenated amorphous and microcrystalline silicon

被引：112

作者：

Beyer, W ^{[1
]}

机构：

[1] Forschungszentrum Julich, Inst Photovoltaik, D-52425 Julich, Germany

来源：

SOLAR ENERGY MATERIALS AND SOLAR CELLS | 2003年 / 78卷 / 1-4期

关键词：

microcrystalline silicon; diffusion; evolution;

D O I：

10.1016/S0927-0248(02)00438-5

中图分类号：

TE [石油、天然气工业]; TK [能源与动力工程];

学科分类号：

0807 ; 0820 ;

摘要：

Hydrogen (H) diffusion and evolution effects in hydrogenated amorphous and microcrystalline silicon (Si) films are discussed. Numerous diffusion and evolution related effects have been discovered and various models for H motion, trapping and evolution effects have been proposed. Microstructure and H diffusion and evolution effects are found to be strongly interdependent. Various aspects of H diffusion in compact material are consistent with a trapping/detrapping motion of atomic H, restricted by H solubility effects and describable in terms of an equilibrium band model. (C) 2002 Elsevier Science B.V. All rights reserved.

引用

页码：235 / 267

页数：33

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