PREPARATION AND PROPERTIES OF SPUTTERED A-SI-H-F FILMS

[1] Anderson D. A., 1980, Journal of the Physical Society of Japan, V49, P1197

[2] ANDERSON DA, 1977, AMORPHOUS LIQUID SEM, P334

[3] TRANSPORT PROPERTIES OF DOPED AMORPHOUS SILICON [J]. SOLID STATE COMMUNICATIONS, 1979, 31 (01) : 1 - 4

[4] COMPARATIVE-STUDY OF HYDROGEN EVOLUTION FROM AMORPHOUS HYDROGENATED SILICON FILMS [J]. THIN SOLID FILMS, 1982, 90 (02) : 145 - 152

[5] INFLUENCE OF EVAPORATION PARAMETERS ON ELECTRICAL PROPERTIES OF AMORPHOUS-GERMANIUM AND SILICON [J]. PHYSICA STATUS SOLIDI A-APPLIED RESEARCH, 1975, 30 (02): : 511 - 520

[6] LITHIUM DOPING OF AMORPHOUS SILICON [J]. JOURNAL OF ELECTRONIC MATERIALS, 1979, 8 (02) : 127 - 137

[7] DETERMINATION OF THE HYDROGEN DIFFUSION-COEFFICIENT IN HYDROGENATED AMORPHOUS-SILICON FROM HYDROGEN EFFUSION EXPERIMENTS [J]. JOURNAL OF APPLIED PHYSICS, 1982, 53 (12) : 8745 - 8750

[8] TRANSPORT IN LITHIUM-DOPED AMORPHOUS SILICON [J]. PHILOSOPHICAL MAGAZINE B-PHYSICS OF CONDENSED MATTER STATISTICAL MECHANICS ELECTRONIC OPTICAL AND MAGNETIC PROPERTIES, 1979, 39 (03): : 205 - 217

[9] INFLUENCE OF ALKALI AND HALOGEN IMPLANTATION ON ELECTRICAL-PROPERTIES OF AMORPHOUS-SILICON [J]. JOURNAL OF NON-CRYSTALLINE SOLIDS, 1980, 35-6 (JAN-) : 321 - 326

[10] BEYER W, 1974, AMORPHOUS LIQUID SEM, P251

[1] Anderson D. A., 1980, Journal of the Physical Society of Japan, V49, P1197

[2] ANDERSON DA, 1977, AMORPHOUS LIQUID SEM, P334

[3] TRANSPORT PROPERTIES OF DOPED AMORPHOUS SILICON [J]. SOLID STATE COMMUNICATIONS, 1979, 31 (01) : 1 - 4

[4] COMPARATIVE-STUDY OF HYDROGEN EVOLUTION FROM AMORPHOUS HYDROGENATED SILICON FILMS [J]. THIN SOLID FILMS, 1982, 90 (02) : 145 - 152

[5] INFLUENCE OF EVAPORATION PARAMETERS ON ELECTRICAL PROPERTIES OF AMORPHOUS-GERMANIUM AND SILICON [J]. PHYSICA STATUS SOLIDI A-APPLIED RESEARCH, 1975, 30 (02): : 511 - 520

[6] LITHIUM DOPING OF AMORPHOUS SILICON [J]. JOURNAL OF ELECTRONIC MATERIALS, 1979, 8 (02) : 127 - 137

[7] DETERMINATION OF THE HYDROGEN DIFFUSION-COEFFICIENT IN HYDROGENATED AMORPHOUS-SILICON FROM HYDROGEN EFFUSION EXPERIMENTS [J]. JOURNAL OF APPLIED PHYSICS, 1982, 53 (12) : 8745 - 8750

[8] TRANSPORT IN LITHIUM-DOPED AMORPHOUS SILICON [J]. PHILOSOPHICAL MAGAZINE B-PHYSICS OF CONDENSED MATTER STATISTICAL MECHANICS ELECTRONIC OPTICAL AND MAGNETIC PROPERTIES, 1979, 39 (03): : 205 - 217

[9] INFLUENCE OF ALKALI AND HALOGEN IMPLANTATION ON ELECTRICAL-PROPERTIES OF AMORPHOUS-SILICON [J]. JOURNAL OF NON-CRYSTALLINE SOLIDS, 1980, 35-6 (JAN-) : 321 - 326

[10] BEYER W, 1974, AMORPHOUS LIQUID SEM, P251