We have fabricated 8 x 8 mu m(2) mesa junctions from ultrahigh vacuum magnetron sputter-deposited Nb/Fe/Al2O3/Al/CoFe/Nb heterostructures. The Al2O3 barrier was prepared by the technique of multiple oxidation. The effect of multiple oxidation on the junction magnetoresistance (JMR) was investigated. JMR up to 6.2% at room temperature and 9.2% at 77 K was obtained. Junctions with the highest JMR have resistance-area products in the range required for device applications. (C) 1998 American Institute of Physics. [S0021-8979(98)52711-9].