Disorder, band offsets and dopability of transparent conducting oxides

被引:21
作者
Robertson, John [1 ]
机构
[1] Univ Cambridge, Dept Engn, Cambridge CB2 1PZ, England
关键词
oxides; tin oxide; zinc oxide; indium oxide; transistor; electronic structure;
D O I
10.1016/j.tsf.2007.03.092
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
N-type transparent conducting oxides are based on ionic oxides with s-like cation conduction bands. The effect of disorder on their conduction band states is found to be small, because angular disorder has no effect on s states. Aliovalent impurities give rise to shallow states at the conduction band, which leads to an absence of a conduction band tail of localized states. This leads to a higher electron mobility than in typical p state amorphous materials like a-Si, the ability to move the Fermi level well into the conduction band and an absence of electrical instability as in a-Si:H. The band offsets. are used to suggest appropriate oxide dielectrics for their thin transistors. (c) 2007 Elsevier B.V. All rights reserved.
引用
收藏
页码:1419 / 1425
页数:7
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