Quantum cascade lasers with low-loss chalcogenide lateral waveguides

被引:22
作者
Gmachl, C [1 ]
Hwang, HY [1 ]
Paiella, R [1 ]
Sivco, DL [1 ]
Baillargeon, JN [1 ]
Capasso, F [1 ]
Cho, AY [1 ]
机构
[1] Lucent Technol, Bell Labs, Murray Hill, NJ 07974 USA
关键词
chalcogenide glass; mid-infrared; pulsed laser ablation; unipolar semiconductor laser; waveguides;
D O I
10.1109/68.914314
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
Quantum cascade lasers have been fabricated with chalcogenide lateral waveguide claddings. Several-micrometer-thick Ge0.25Se0.76 glass has been deposited by pulsed laser ablation onto the sidewalls of narrow, deep etched laser ridges. Due to the intrinsically low mid-infrared attenuation of the chalcogenide material, the waveguide loss of the lasers is significantly reduced, by up to similar to 50%, depending on the ridge width, when compared to conventional ridge waveguides, This resulted in an improved overall laser performance, such as a reduction of the threshold current density, an increase in slope efficiency, and an improved temperature performance.
引用
收藏
页码:182 / 184
页数:3
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