Coulomb blockade effects in a highly doped silicon quantum wire fabricated on novel molecular beam epitaxy grown material

被引:18
作者
Koester, T
Goldschmidtboeing, F
Hadam, B
Stein, J
Altmeyer, S
Spangenberg, B
Kurz, H
Neumann, R
Brunner, K
Abstreiter, G
机构
[1] Rhein Westfal TH Klinikum, Inst Halbleitertech Lehrstuhl 2, D-52074 Aachen, Germany
[2] Tech Univ Munich, Walter Schottky Inst, D-85748 Garching, Germany
来源
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS | 1999年 / 38卷 / 1B期
关键词
Coulomb blockade; BESOI; silicon; molecular beam epitaxy; single electron tunneling transistors; electron beam lithography;
D O I
10.1143/JJAP.38.465
中图分类号
O59 [应用物理学];
学科分类号
摘要
Coulomb blockade effects are studied in highly doped molecular-beam-epitaxy grown silicon quantum wires. The nanometer structure of the single electron tunneling transistor (ETT) is fabricated by electron beam lithography (EBL), anisotropic reactive ion etching (RIE) and low temperature oxide deposition. An extended Coulomb blockade is observed even at T = 130 K in the I-V characteristics, while outside the blockade region a clear Coulomb staircase is visible. The zero-conductivity range is significantly affected by the applied gate voltage. In addition, oscillations of the Coulomb blockade with gate potential are observed. The nature of tunnel barriers present in this wire is discussed.
引用
收藏
页码:465 / 468
页数:4
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