Direct synthesis of single-crystalline silicon nanowires using molten gallium and silane plasma

被引:81
作者
Sharma, S [1 ]
Sunkara, MK [1 ]
机构
[1] Univ Louisville, Dept Chem Engn, Louisville, KY 40292 USA
关键词
D O I
10.1088/0957-4484/15/1/025
中图分类号
TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
We report the first ever demonstration of using silane directly in the gas phase and molten gallium in a microwave plasma for bulk nucleation and growth of single-crystal quality silicon nanowires. Multiple nanowires nucleated and grew from micron- to millimetre-sized gallium droplets. The resulting nanowires were tens to hundreds of nanometres in diameter and were tens to hundreds of microns long. Transmission electron microscopy results confirmed the nanowires to be single crystalline, devoid of structural defects, and grown along the (100) direction. The as-synthesized silicon nanowires were sheathed with an ultrathin (< 1 nm) non-uniform native oxide amorphous layer that could be directly used in the assembly of electronic and optoelectronic devices.
引用
收藏
页码:130 / 134
页数:5
相关论文
共 14 条
[1]  
CHANDRASEKARAN H, 2001, P MRS FALL 2001 M PI, V693, P159
[2]   Control of thickness and orientation of solution-grown silicon nanowires [J].
Holmes, JD ;
Johnston, KP ;
Doty, RC ;
Korgel, BA .
SCIENCE, 2000, 287 (5457) :1471-1473
[3]   THERMODYNAMIC MODELING OF SELECTIVE CHEMICAL VAPOR-DEPOSITION PROCESSES IN MICROELECTRONIC SILICON [J].
MADAR, R ;
BERNARD, C .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1990, 8 (03) :1413-1421
[4]   A laser ablation method for the synthesis of crystalline semiconductor nanowires [J].
Morales, AM ;
Lieber, CM .
SCIENCE, 1998, 279 (5348) :208-211
[5]   Direct synthesis of gallium oxide tubes, nanowires, and nanopaintbrushes [J].
Sharma, S ;
Sunkara, MK .
JOURNAL OF THE AMERICAN CHEMICAL SOCIETY, 2002, 124 (41) :12288-12293
[6]  
Sharma S, 2002, MATER RES SOC SYMP P, V703, P123
[7]   Reductive growth of nanosized ligated metal clusters on silicon nanowires [J].
Sun, XH ;
Li, CP ;
Wong, NB ;
Lee, CS ;
Lee, ST .
INORGANIC CHEMISTRY, 2002, 41 (17) :4331-4336
[8]   Surface reactivity of Si nanowires [J].
Sun, XH ;
Peng, HY ;
Tang, YH ;
Shi, WS ;
Wong, NB ;
Lee, CS ;
Lee, ST ;
Sham, TK .
JOURNAL OF APPLIED PHYSICS, 2001, 89 (11) :6396-6399
[9]   Bulk synthesis of silicon nanowires using a low-temperature vapor-liquid-solid method [J].
Sunkara, MK ;
Sharma, S ;
Miranda, R ;
Lian, G ;
Dickey, EC .
APPLIED PHYSICS LETTERS, 2001, 79 (10) :1546-1548
[10]   A model for growth directional features in silicon nanowires [J].
Tan, TY ;
Lee, ST ;
Gösele, U .
APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING, 2002, 74 (03) :423-432