InGaN/GaN/AlGaN-based laser diodes with cleaved facets grown on GaN substrates

被引:131
作者
Nakamura, S [1 ]
Senoh, M [1 ]
Nagahama, S [1 ]
Iwasa, N [1 ]
Yamada, T [1 ]
Matsushita, T [1 ]
Kiyoku, H [1 ]
Sugimoto, Y [1 ]
Kozaki, T [1 ]
Umemoto, H [1 ]
Sano, M [1 ]
Chocho, K [1 ]
机构
[1] Nichia Chem Ind Ltd, Dept Res & Dev, Tokushima 774, Japan
关键词
D O I
10.1063/1.122016
中图分类号
O59 [应用物理学];
学科分类号
摘要
After obtaining an epitaxially laterally overgrown GaN on sapphire by the metalorganic chemical vapor deposition method, GaN growth was continued up to a thickness of 200 mu m by a hydride vapor phase epitaxy method. The InGaN multi-quantum-well-structure laser diode (LD) was grown on a free-standing GaN substrate, which was obtained by removing the sapphire substrate. The LDs with cleaved mirror facets showed an output power as high as 160 mW under room-temperature continuous-wave (CW) operation. The fundamental transverse mode was observed up to an output power of 80 mW. The lifetime of the LDs at a constant output power of 5 mW was about 180 h under CW operation at an ambient temperature of 50 degrees C, due to a high threshold current density of 14 kA/cm(2). (C) 1998 American Institute of Physics.
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页码:832 / 834
页数:3
相关论文
共 9 条
[1]   Pulsed operation lasing in a cleaved-facet InGaN/GaN MQW SCH laser grown on 6H-SiC [J].
Bulman, GE ;
Doverspike, K ;
Sheppard, ST ;
Weeks, TW ;
Kong, HS ;
Dieringer, HM ;
Edmond, JA ;
Brown, JD ;
Swindell, JT ;
Schetzina, JF .
ELECTRONICS LETTERS, 1997, 33 (18) :1556-1557
[2]   Excitation of a higher order transverse mode in an optically pumped In0.15Ga0.85N/In0.05Ga0.95N multiquantum well laser structure [J].
Hofstetter, D ;
Bour, DP ;
Thornton, RL ;
Johnson, NM .
APPLIED PHYSICS LETTERS, 1997, 70 (13) :1650-1652
[3]   Room temperature pulsed operation of nitride based multi-quantum-well laser diodes with cleaved facets on conventional C-face sapphire substrates [J].
Itaya, K ;
Onomura, M ;
Nishio, J ;
Sugiura, L ;
Saito, S ;
Suzuki, M ;
Rennie, J ;
Nunoue, SY ;
Yamamoto, M ;
Fujimoto, H ;
Kokubun, Y ;
Ohba, Y ;
Hatakoshi, G ;
Ishikawa, M .
JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS & EXPRESS LETTERS, 1996, 35 (10B) :L1315-L1317
[4]   InGaN laser diode grown on 6H-SiC substrate using low-pressure metal organic vapor phase epitaxy [J].
Kuramata, A ;
Domen, K ;
Soejima, R ;
Horino, K ;
Kubota, S ;
Tanahashi, T .
JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS & EXPRESS LETTERS, 1997, 36 (9AB) :L1130-L1132
[5]  
Mack MP, 1997, MRS INTERNET J N S R, V2, part. no.
[6]   InGaN/GaN/AlGaN-based laser diodes with modulation-doped strained-layer superlattices [J].
Nakamura, S ;
Senoh, M ;
Nagahama, S ;
Iwasa, N ;
Yamada, T ;
Matsushita, T ;
Kiyoku, H ;
Sugimoto, Y ;
Kozaki, T ;
Umemoto, H ;
Sano, M ;
Chocho, K .
JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS & EXPRESS LETTERS, 1997, 36 (12A) :L1568-L1571
[7]   Lateral epitaxy of low defect density GaN layers via organometallic vapor phase epitaxy [J].
Nam, OH ;
Bremser, MD ;
Zheleva, TS ;
Davis, RF .
APPLIED PHYSICS LETTERS, 1997, 71 (18) :2638-2640
[8]  
NKAMURA S, 1997, BLUE LASER DIODE
[9]   Thick GaN epitaxial growth with low dislocation density by hydride vapor phase epitaxy [J].
Usui, A ;
Sunakawa, H ;
Sakai, A ;
Yamaguchi, AA .
JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS, 1997, 36 (7B) :L899-L902