Synthesis of carbon nanotubes by microwave plasma-enhanced hot filament chemical vapor deposition

被引：14

作者：

Chiu, Chien-Chao ^{[1
]}

Yoshimura, Masamichi ^{[1
]}

Ueda, Kazuyuki ^{[1
]}

机构：

[1] Toyota Technol Inst, Nano Hightech Res Ctr, Tempaku Ku, Nagoya, Aichi 4688511, Japan

来源：

关键词：

CNT; plasma; hot filament; CVD;

D O I：

10.1016/j.diamond.2007.08.031

中图分类号：

T [工业技术];

学科分类号：

08 [工学];

摘要：

A combined system of microwave plasma-enhanced chemical vapor deposition (MPECVD) and hot filament CVD (HFCVD) has been developed for the growth of various carbon nanotubes, where the source gas (methane) can be decomposed independently through microwave plasma and hot tungsten filament. It is found that microwave plasma provides more efficiently carbon sources for the growth of carbon nanotubes (CNTs). By the help of microwave plasma, long CNTs array with length of 0.3 mm and high-density single-walled carbon nanotubes (SWNTs) have been grown by thermal CVD and hot filament CVD, respectively. Raman spectra of the SWNTs reveal high crystalline as well as narrow diameter distribution. (C) 2007 Elsevier B.V. All rights reserved.

引用

页码：611 / 614

页数：4

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