A cold plasma jet device with multiple plasma plumes merged

被引:24
作者
Lu, XinPei [1 ]
Xiong, Qing [1 ]
Tang, ZhiYuan [1 ]
Jiang, ZhongHe [1 ]
Pan, Yuan [1 ]
机构
[1] Huazhong Univ Sci & Technol, Coll Elect & Elect Engn, Wuhan 430074, Peoples R China
关键词
atmospheric pressure plasma; decontamination; dielectric barrier discharge; nonequilibrium plasma; nonthermal plasma; plasma jet; surface modification;
D O I
10.1109/TPS.2008.922441
中图分类号
O35 [流体力学]; O53 [等离子体物理学];
学科分类号
070204 ; 080103 ; 080704 ;
摘要
As nonthermal atmospheric pressure plasmas come to play an important role in diverse applications, reliable and arcing-free low-temperature plasma sources are needed urgently. In this paper, a low-temperature plasma jet device, which generated four plasma plumes simultaneously, is developed. The plasma jet device can be driven by pulsed do or kilohertz ac power supply. There is no risk of arcing. When the plasma plumes are contacted with a conductive surface, the four plasma plumes merge together and form a uniform plasma layer on the surface of conductive material with an area of about 1 cm(2). The gas temperature of the plasma plumes is close to room temperature.
引用
收藏
页码:990 / 991
页数:2
相关论文
共 11 条
[1]   Deposition of silicon dioxide films with an atmospheric-pressure plasma jet [J].
Babayan, SE ;
Jeong, JY ;
Tu, VJ ;
Park, J ;
Selwyn, GS ;
Hicks, RF .
PLASMA SOURCES SCIENCE & TECHNOLOGY, 1998, 7 (03) :286-288
[2]   Microplasma jet at atmospheric pressure [J].
Hong, Yong Cheol ;
Uhm, Han Sup .
APPLIED PHYSICS LETTERS, 2006, 89 (22)
[3]   Dielectric-barrier discharges: Their history, discharge physics, and industrial applications [J].
Kogelschatz, U .
PLASMA CHEMISTRY AND PLASMA PROCESSING, 2003, 23 (01) :1-46
[4]   Consequences of asymmetric pumping in low pressure plasma processing reactors: A three-dimensional modeling study [J].
Kushner, MJ .
JOURNAL OF APPLIED PHYSICS, 1997, 82 (11) :5312-5320
[5]   Room-temperature atmospheric pressure plasma plume for biomedical applications [J].
Laroussi, M ;
Lu, X .
APPLIED PHYSICS LETTERS, 2005, 87 (11)
[6]   Dynamics of an atmospheric pressure plasma plume generated by submicrosecond voltage pulses [J].
Lu, XinPei ;
Laroussi, Mounir .
JOURNAL OF APPLIED PHYSICS, 2006, 100 (06)
[7]   Colloquium:: Reactive plasmas as a versatile nanofabrication tool [J].
Ostrikov, K .
REVIEWS OF MODERN PHYSICS, 2005, 77 (02) :489-511
[8]   Plasma needle for in vivo medical treatment:: recent developments and perspectives [J].
Stoffels, E. ;
Kieft, I. E. ;
Sladek, R. E. J. ;
van den Bedem, L. J. M. ;
van der Laan, E. P. ;
Steinbuch, M. .
PLASMA SOURCES SCIENCE & TECHNOLOGY, 2006, 15 (04) :S169-S180
[9]   A new small microwave plasma torch [J].
Stonies, R ;
Schermer, S ;
Voges, E ;
Broekaert, JAC .
PLASMA SOURCES SCIENCE & TECHNOLOGY, 2004, 13 (04) :604-611
[10]   High-speed photographs of a dielectric barrier atmospheric pressure plasma jet [J].
Teschke, M ;
Kedzierski, J ;
Finantu-Dinu, EG ;
Korzec, D ;
Engemann, J .
IEEE TRANSACTIONS ON PLASMA SCIENCE, 2005, 33 (02) :310-311