Centrifugal pumping during Czochralski silicon growth with a strong, non-uniform, axisymmetric magnetic field

被引:5
作者
Khine, YY [1 ]
Walker, JS [1 ]
机构
[1] UNIV ILLINOIS,DEPT MECH & IND ENGN,URBANA,IL 61801
基金
美国国家科学基金会;
关键词
D O I
10.1016/0022-0248(96)00199-6
中图分类号
O7 [晶体学];
学科分类号
0702 ; 070205 ; 0703 ; 080501 ;
摘要
Centrifugal pumping flows are produced in the melt by the rotations of crystal and crucible during the Czochralski growth of silicon crystals. This paper treats the centrifugal pumping effects with a steady, strong, non-uniform axisymmetric magnetic field. We consider a family of magnetic fields ranging from a uniform axial field to a ''cusp'' field, which has a purely radial field at the crystal-melt interface and free surface. We present the numerical solutions for the centrifugal pumping flows as the magnetic field is changed continuously from a uniform axial field to a cusp one, and for arbitrary Hartmann number. Since the perfect alignment between the local magnetic field vector and the crystal-melt interface or free surface is not likely, we also investigate the effects of a slight misalignment.
引用
收藏
页码:372 / 380
页数:9
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