Integrated optics in silicon and SiGe-heterostructures

被引:57
作者
Schuppert, B
Schmidtchen, J
Splett, A
Fischer, U
Zinke, T
Moosburger, R
Petermann, K
机构
[1] Technische Universität Berlin, Fachgebiet Hochfrequenztechnik, D-10587 Berlin
[2] Technische Universität Berlin, Berlin
关键词
D O I
10.1109/50.541223
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
This paper reviews various techniques and ideas in the field of integrated optics in silicon, mainly focused on silicon in conjunction with germanium, We will discuss different approaches for waveguides, passive and active components in silicon as well as recent developments in the fabrication and performance of such components, For waveguides in silicon, the characteristics such as losses and spot-sizes will be given, showing that silicon could be an attractive candidate for integrated optical devices.
引用
收藏
页码:2311 / 2323
页数:13
相关论文
共 58 条
[1]   PASSIVE COUPLING OF INGAASP/INP LASER ARRAY AND SINGLEMODE FIBERS USING SILICON WAFERBOARD [J].
ARMIENTO, CA ;
TABASKY, M ;
JAGANNATH, C ;
FITZGERALD, TW ;
SHIEH, CL ;
BARRY, V ;
ROTHMAN, M ;
NEGRI, A ;
HAUGSJAA, PO ;
LOCKWOOD, HF .
ELECTRONICS LETTERS, 1991, 27 (12) :1109-1111
[2]   RECENT DEVELOPMENTS IN THE STRAINED LAYER EPITAXY OF GERMANIUM-SILICON ALLOYS [J].
BEAN, JC .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1986, 4 (06) :1427-1429
[3]  
Crank J., 1986, MATH DIFFUSION
[4]   LATERAL EPITAXY BY SEEDED SOLIDIFICATION FOR GROWTH OF SINGLE-CRYSTAL SI FILMS ON INSULATORS [J].
FAN, JCC ;
GEIS, MW ;
TSAUR, BY .
APPLIED PHYSICS LETTERS, 1981, 38 (05) :365-367
[5]  
FISCHER U, 1995, P SOC PHOTO-OPT INS, V2449, P332, DOI 10.1117/12.201986
[6]   OPTICAL WAVE-GUIDE SWITCHES IN SILICON-BASED ON GE-INDIFFUSED WAVE-GUIDES [J].
FISCHER, U ;
SCHUPPERT, B ;
PETERMANN, K .
IEEE PHOTONICS TECHNOLOGY LETTERS, 1994, 6 (08) :978-980
[7]  
FISCHER U, 1996, IEEE PHOTONIC TECH L, P647
[8]   HYBRID INTEGRATION OF SEMICONDUCTOR-LASERS WITH SI-BASED SINGLE-MODE RIDGE WAVE-GUIDES [J].
FRIEDRICH, EEL ;
OBERG, MG ;
BROBERG, B ;
NILSSON, S ;
VALETTE, S .
JOURNAL OF LIGHTWAVE TECHNOLOGY, 1992, 10 (03) :336-340
[9]  
GUERRA MA, 1990, SOLID STATE TECHNOL, V33, P75
[10]   MODE DISPERSION IN DIFFUSED CHANNEL WAVEGUIDES BY EFFECTIVE INDEX METHOD [J].
HOCKER, GB ;
BURNS, WK .
APPLIED OPTICS, 1977, 16 (01) :113-118