Shear-induced alignment in thin films of spherical nanodomains

被引:131
作者
Angelescu, DE [1 ]
Waller, JH
Register, RA
Chaikin, PM
机构
[1] Princeton Univ, Dept Phys, Princeton, NJ 08544 USA
[2] Univ Oxford, Dept Mat, Oxford OX1 3PH, England
[3] Princeton Univ, Dept Chem Engn, Princeton, NJ 08544 USA
关键词
D O I
10.1002/adma.200401994
中图分类号
O6 [化学];
学科分类号
0703 ;
摘要
Large-scale alignment of bilayer block copolymer films by applying in-plane shear is demonstrated. The method eliminates all disclinations and most dislocations from arbitrarily large samples, as evidenced by atomic force microscopy of the microdomain lattice (Figure, left) as well as its Fourier transform (Figure, right). The resulting films can act as ordered nanolithographic templates.
引用
收藏
页码:1878 / +
页数:5
相关论文
共 28 条
[1]   DYNAMICALLY SHEARED BODY-CENTERED-CUBIC ORDERED DIBLOCK COPOLYMER MELT [J].
ALMDAL, K ;
KOPPI, KA ;
BATES, FS .
MACROMOLECULES, 1993, 26 (15) :4058-4060
[2]   Macroscopic orientation of block copolymer cylinders in single-layer films by shearing [J].
Angelescu, DE ;
Waller, JH ;
Adamson, DH ;
Deshpande, P ;
Chou, SY ;
Register, RA ;
Chaikin, PM .
ADVANCED MATERIALS, 2004, 16 (19) :1736-+
[3]  
ANGELESCU DE, 2003, THESIS PRINCETON U
[4]   Templated self-assembly of block copolymers: Effect of substrate topography [J].
Cheng, JY ;
Ross, CA ;
Thomas, EL ;
Smith, HI ;
Vancso, GJ .
ADVANCED MATERIALS, 2003, 15 (19) :1599-+
[5]   Magnetic properties of large-area particle arrays fabricated using block copolymer lithography [J].
Cheng, JY ;
Ross, CA ;
Thomas, EL ;
Smith, HI ;
Lammertink, RGH ;
Vancso, GJ .
IEEE TRANSACTIONS ON MAGNETICS, 2002, 38 (05) :2541-2543
[6]   Fabrication of nanostructures with long-range order using block copolymer lithography [J].
Cheng, JY ;
Ross, CA ;
Thomas, EL ;
Smith, HI ;
Vancso, GJ .
APPLIED PHYSICS LETTERS, 2002, 81 (19) :3657-3659
[7]  
Cheng JY, 2001, ADV MATER, V13, P1174, DOI 10.1002/1521-4095(200108)13:15<1174::AID-ADMA1174>3.0.CO
[8]  
2-Q
[9]  
Guarini K. W., 2003, IEEE INT EL DEV M 20
[10]   Process integration of self-assembled polymer templates into silicon nanofabrication [J].
Guarini, KW ;
Black, CT ;
Zhang, Y ;
Kim, H ;
Sikorski, EM ;
Babich, IV .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 2002, 20 (06) :2788-2792