Nanomechanical displacement detection using fiber-optic interferometry

被引:34
作者
Azak, N. O.
Shagam, M. Y.
Karabacak, D. M.
Ekinci, K. L. [1 ]
Kim, D. H.
Jang, D. Y.
机构
[1] Boston Univ, Coll Engn, Boston, MA 02215 USA
[2] Seoul Natl Univ, Coll Engn, Seoul 139743, South Korea
关键词
D O I
10.1063/1.2776981
中图分类号
O59 [应用物理学];
学科分类号
摘要
We describe a fiber-optic interferometer to detect the motion of nanomechanical resonators. In this system, the primary technical challenge of aligning the fiber-optic probe to nanometer-scale resonators is overcome by simply monitoring the scattered light from the devices. The system includes no free-space optical components, and is thus simple, stable, and compact with an estimated displacement sensitivity of similar to 0.3 pm/root Hz at optical power levels of similar to 0.75 mW.
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页数:3
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