Angular laser cleaning for effective removal of particles from a solid surface

被引：27

作者：

Lee, JM ^{[1
]}

Watkins, KG ^{[1
]}

Steen, WM ^{[1
]}

机构：

[1] Univ Liverpool, Dept Engn, Laser Grp, Liverpool L69 3GH, Merseyside, England

来源：

APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING | 2000年 / 71卷 / 06期

关键词：

Laser cleaning;

D O I：

10.1007/s003390000583

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Laser removal of small particles fi om a metal surface is carried out by changing the incident angle of the laser beam. It has been found that a dramatic improvement of cleaning efficiency in terms of area and energy is observed when using the laser at glancing angle of incidence as compared to perpendicular Furthermore substrate damage is greatly reduced and probably eliminated at glancing angles. The process mechanism is discussed by considering the adhesion and the laser-induced cleaning forces for different incident angles. It is shown that there are different laser-matter interactions operating.

引用

页码：671 / 674

页数：4

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