共 34 条
[1]
[Anonymous], 1994, Handbook of De- position Technologies for Films and Coatings- Science, Technology and Applications
[3]
MODELING OF REACTIVE SPUTTERING OF COMPOUND MATERIALS
[J].
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS,
1987, 5 (02)
:202-207
[4]
PROCESS MODELING OF REACTIVE SPUTTERING
[J].
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS,
1989, 7 (03)
:1225-1229
[5]
BERG S, 1994, SURF COAT TECH, V68, P356
[7]
*CNRS, 1987, INT PLASM FROIDS MAT
[9]
Garcia-Rosales C., 1994, J NUCL MATER, V218, P8
[10]
HARPER JME, 1984, ION BEAM BOMBARDMENT