SYNTHESIS OF ZIRCONIUM NITRIDE FILMS MONITORED BY IN-SITU SOFT-X-RAY SPECTROMETRY

Zirconium nitride films of different stoichiometries can be obtained by de-reactive sputtering. Their composition is monitored during the deposition itself by following the X-ray emission spectra of Zr and N induced by the bombardment of the film with high energy electrons from the discharge. By changing the experimental conditions, a large variety of compounds has been synthesized. In order to calibrate the X-ray data, the films have been analysed by a wet chemistry method. The results indicate that the matrix effects may be neglected. On the other hand, significant broadening and chemical shift are observed on NKalpha and ZrM(zeta) lines.