A STUDY OF NITROGEN-RICH TITANIUM AND ZIRCONIUM NITRIDE FILMS

被引：43

作者：

RISTOLAINEN, EO

MOLARIUS, JM

KORHONEN, AS

LINDROOS, VK

机构：

[1] HELSINKI UNIV TECHNOL,PHYS MET LAB,SF-02150 ESPOO 15,FINLAND

[2] HELSINKI UNIV TECHNOL,MET WORKING & HEAT TREATMENT LAB,SF-02150 ESPOO 15,FINLAND

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1987年 / 5卷 / 04期

关键词：

D O I：

10.1116/1.574950

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

引用

页码：2184 / 2189

页数：6

共 25 条

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[3] Higher nitrides of hafnium, zirconium, and titanium synthesized by dual ion beam deposition
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