X-ray and neutron reflectivity

被引:35
作者
Tolan, M [1 ]
Press, W [1 ]
机构
[1] Univ Kiel, Inst Expt & Angew Phys, D-24098 Kiel, Germany
来源
ZEITSCHRIFT FUR KRISTALLOGRAPHIE | 1998年 / 213卷 / 06期
关键词
D O I
10.1524/zkri.1998.213.6.319
中图分类号
O7 [晶体学];
学科分类号
0702 ; 070205 ; 0703 ; 080501 ;
摘要
The general concepts of x-ray and neutron reflectivity are outlined. Theoretical principles are discussed at the beginning where both, the optical treatment based on the solution of the Helmholtz equation and the kinematical scattering formalism are given. Afterwards experimental standard setups are presented, and a small fraction of the work that has been done in the past is discussed. The examples deal with scattering from liquid thin films and polymer films where x-ray and neutron reflectivity are almost unique probes to obtain structural information. This is in particular true for polymer/polymer interfaces where neutron reflectivity has one of its most prominent applications. Other examples show how oxidation processes can be monitored by x-ray reflectivity and how layer systems of technological importance, here CoSi2 layers, can be quantitatively characterized. Furthermore off-specular scattering is briefly discussed and its importance for a complete analysis emphazised.
引用
收藏
页码:319 / 336
页数:18
相关论文
共 93 条
[41]  
LOHSE B, UNPUB
[42]   X-RAY REFLECTIVITY MEASUREMENTS OF SURFACE LAYERING IN LIQUID MERCURY [J].
MAGNUSSEN, OM ;
OCKO, BM ;
REGAN, MJ ;
PENANEN, K ;
PERSHAN, PS ;
DEUTSCH, M .
PHYSICAL REVIEW LETTERS, 1995, 74 (22) :4444-4447
[43]  
Mandelbrot B.B., 1983, The fractal geometry of nature
[44]   ION-BEAM SYNTHESIS OF EPITAXIAL SILICIDES - FABRICATION, CHARACTERIZATION AND APPLICATIONS [J].
MANTL, S .
MATERIALS SCIENCE REPORTS, 1992, 8 (1-2) :1-95
[45]   NEW METHOD FOR EPITAXIAL HETEROSTRUCTURE LAYER GROWTH [J].
MANTL, S ;
BAY, HL .
APPLIED PHYSICS LETTERS, 1992, 61 (03) :267-269
[46]  
MANTL S, 1995, PHYS BL, V51, P951
[47]  
Messiah A., 1985, QUANTENMECHANIK, V2
[48]   MICROSCOPIC STRUCTURE OF INTERFACES IN SI1-XGE/SI HETEROSTRUCTURES AND SUPERLATTICES STUDIED BY X-RAY-SCATTERING AND FLUORESCENCE YIELD [J].
MING, ZH ;
KROL, A ;
SOO, YL ;
KAO, YH ;
PARK, JS ;
WANG, KL .
PHYSICAL REVIEW B, 1993, 47 (24) :16373-16381
[49]   ANNEALING OF SILICON IMPLANTED BY A HIGH-DOSE OF COBALT IONS INVESTIGATED BY IN-SITU X-RAY-DIFFRACTION [J].
MULLER, M ;
BAHR, D ;
PRESS, W ;
JEBASINSKI, R ;
MANTL, S .
JOURNAL OF APPLIED PHYSICS, 1993, 74 (03) :1590-1596
[50]   X-RAY STUDY OF THE WETTING BEHAVIOR OF CCL4 ON SI/SIO2 SURFACES [J].
MULLERBUSCHBAUM, P ;
TOLAN, M ;
PRESS, W .
ZEITSCHRIFT FUR PHYSIK B-CONDENSED MATTER, 1994, 95 (03) :331-339