Apertureless near-field scanning optical microscope based on a quartz tuning fork

被引:18
作者
De Wilde, Y [1 ]
Formanek, F [1 ]
Aigouy, L [1 ]
机构
[1] Ecole Super Phys & Chim Ind Ville Paris, CNRS, UPR A0005, Lab Opt Phys, F-75005 Paris, France
关键词
D O I
10.1063/1.1593785
中图分类号
TH7 [仪器、仪表];
学科分类号
0804 ; 080401 ; 081102 ;
摘要
The design of an apertureless near-field scanning optical microscope (ANSOM) is presented. The system operates in tapping mode with a tungsten tip mounted on a quartz tuning fork, which periodically scatters the near field at the sample surface. The tip-tuning fork structure is made short so that it can accommodate a standard high numerical aperture microscope objective. We describe the mounting of the tip on the tuning fork. Topographical and optical images, in the visible (lambda=655 nm) and in the infrared (lambda=10.6 mum), of subwavelength holes in a chromium film demonstrate that the ANSOM routinely achieves a resolution of a few tens of nanometers. (C) 2003 American Institute of Physics.
引用
收藏
页码:3889 / 3891
页数:3
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