Two-dimensional modeling of a microcell plasma in a mixture of Ne/Xe driven by a capacitively coupled high-frequency source

被引:16
作者
Kurihara, M [1 ]
Makabe, T [1 ]
机构
[1] Keio Univ, Dept Elect & Elect Engn, Yokohama, Kanagawa 2238522, Japan
关键词
D O I
10.1063/1.1370360
中图分类号
O59 [应用物理学];
学科分类号
摘要
The basic characteristics of a micro-cell plasma in a gas mixture sustained by a high-frequency voltage source with a ring-shaped electrode are described in this article. The key to maintaining a microcell plasma is to reduce wall loss and increase plasma production. The advantage of a gas mixture of Ne/Xe is the increase of the plasma production rate in a low electric field compared to that in pure gas. As a result, a microcell plasma can be sustained by a lower applied voltage by using a gas mixture of Ne/Xe under the same power condition as compared with that in pure Xe. (C) 2001 American Institute of Physics.
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页码:7756 / 7763
页数:8
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