Direct current plasma jet needle source

被引：47

作者：

Dudek, D. ^{[1
]}

Bibinov, N. ^{[2
]}

Engemann, J. ^{[1
]}

Awakowicz, P. ^{[2
]}

机构：

[1] Wuppertal Univ, Microstruct Res Ctr, D-42119 Wuppertal, Germany

[2] Ruhr Univ Bochum, Inst Elect Engn, D-44780 Bochum, Germany

来源：

JOURNAL OF PHYSICS D-APPLIED PHYSICS | 2007年 / 40卷 / 23期

关键词：

D O I：

10.1088/0022-3727/40/23/017

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

Direct current plasma jet source operated in a glow regime is studied by applying nitrogen as a feed gas. This plasma jet generates fluxes of atoms, which are produced in the small region near the cathode tip characterized by high luminosity and a high dissociation rate of molecules. The nitrogen atoms carried away from this region by the feed gas flow form the narrow effluent of the plasma jet source. The gas temperature in the effluent flow is lower than 400K despite the relatively high temperature of up to 950K in the active plasma zone near the cathode tip.

引用

页码：7367 / 7371

页数：5

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