Characterization of the inverted Ga0.52In0.48P/GaAs (001) junctions using current-voltage and capacitance-voltage measurements

被引:16
作者
Cai, C [1 ]
Nathan, MI
Lim, TH
机构
[1] Univ Minnesota, Dept Elect & Comp Engn, Minneapolis, MN 55455 USA
[2] Univ Minnesota, Dept Chem Engn & Mat Sci, Minneapolis, MN 55455 USA
关键词
D O I
10.1063/1.123102
中图分类号
O59 [应用物理学];
学科分类号
摘要
Al/u:GaAs/n:Ga0.52In0.48P inverted-structure (GaAs on top) Schottky diodes on n(+) GaAs (001) substrates have been grown by gas source molecular beam epitaxy with several GaAs thicknesses from 10 to 100 nm. The barrier height determined by the capacitance versus voltage method is substantially higher than the barrier height determined by the current versus voltage method. These results suggest that there is a negative interface charge 6-8 X 10(11)/cm(-2) at the GaAs/Ga0.52In0.48P interface, which is opposite in sign to the interface charge at the normal structure of the Ga0.52In0.48P/GaAs heterojunction reported previously. (C) 1999 American Institute of Physics. [S0003-6951(99)01505-3].
引用
收藏
页码:720 / 722
页数:3
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