Chemical vapor deposition of electroceramic thin films

被引：58

作者：

deKeijser, M

Dormans, GJM

机构：

来源：

MRS BULLETIN | 1996年 / 21卷 / 06期

关键词：

D O I：

10.1557/S0883769400046066

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

[No abstract available]

引用

页码：37 / 43

页数：7

共 12 条

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[8]

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[9]

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[10]

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