Miniature endoscopic optical coherence tomography probe employing a two-axis microelectromechanical scanning mirror with through-silicon vias

被引：23

作者：

Liu, Lin ^{[1
]}

Wu, Lei ^{[2
]}

Sun, Jingjing ^{[1
]}

Lin, Elaine ^{[1
]}

Xie, Huikai ^{[1
,2
]}

机构：

[1] Univ Florida, Dept Elect & Comp Engn, Gainesville, FL 32611 USA

[2] WiOptix Inc, Gainesville, FL 32611 USA

来源：

JOURNAL OF BIOMEDICAL OPTICS | 2011年 / 16卷 / 02期

基金：

美国国家科学基金会;

关键词：

optical coherence tomography; endoscopic probe; MEMS mirror; through-silicon via; electrothermal actuation; HIGH-SPEED;

D O I：

10.1117/1.3533323

中图分类号：

Q5 [生物化学];

学科分类号：

070307 [化学生物学];

摘要：

We present the design and experimental results of a new MEMS-based endoscopic optical coherence tomography (OCT) probe. The uniqueness of this miniature OCT imaging probe is a two-axis MEMS mirror with through-silicon vias (TSVs) for interconnecting. The TSV interconnection enables ultracompact probe design, successfully reducing the probe size to only 2.6 mm in diameter. The MEMS mirror is actuated by an electrothermal actuator that is capable of scanning +/- 16 degrees. at only 3.6 V DC. Two-dimensional and three-dimensional OCT images of microspheres embedded in PDMS and acute rat brain tissue have been obtained with this miniature probe in a time-domain OCT system. (C) 2011 Society of Photo-Optical Instrumentation Engineers (SPIE). [DOI: 10.1117/1.3533323]

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