Simultaneous detection of translational and angular displacements of micromachined elements

被引:49
作者
Hwu, E. -T. [1 ]
Hung, S. -K.
Yang, C. -W.
Hwang, I. -S.
Huang, K. -Y.
机构
[1] Acad Sinica, Inst Phys, Taipei, Taiwan
[2] Natl Taiwan Univ, Dept Mech Engn, Taipei 10764, Taiwan
关键词
D O I
10.1063/1.2817750
中图分类号
O59 [应用物理学];
学科分类号
摘要
An astigmatic detection system is constructed with a modified digital-versatile-disk optical head. This system, with a detecting spot of similar to 1 mu m, can simultaneously measure the vertical displacements and two-dimensional angular tilts of micromachined elements. It can detect thermal vibrations of microfabricated cantilevers with noise levels of 1.3 pm Hz(-1/2) for the linear displacement and of 3.2 nrad Hz(-1/2) for angular displacements over a frequency range from 1 to 800 kHz. The detecting frequency can even reach beyond 100 MHz if high-speed electronic devices are adopted. Further optimization of the system will broaden its applications in diverse technological fields. (C) 2007 American Institute of Physics.
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页数:3
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