Simultaneous detection of translational and angular displacements of micromachined elements

被引：49

作者：

Hwu, E. -T. ^{[1
]}

Hung, S. -K.

Yang, C. -W.

Hwang, I. -S.

Huang, K. -Y.

机构：

[1] Acad Sinica, Inst Phys, Taipei, Taiwan

[2] Natl Taiwan Univ, Dept Mech Engn, Taipei 10764, Taiwan

来源：

APPLIED PHYSICS LETTERS | 2007年 / 91卷 / 22期

关键词：

D O I：

10.1063/1.2817750

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

An astigmatic detection system is constructed with a modified digital-versatile-disk optical head. This system, with a detecting spot of similar to 1 mu m, can simultaneously measure the vertical displacements and two-dimensional angular tilts of micromachined elements. It can detect thermal vibrations of microfabricated cantilevers with noise levels of 1.3 pm Hz(-1/2) for the linear displacement and of 3.2 nrad Hz(-1/2) for angular displacements over a frequency range from 1 to 800 kHz. The detecting frequency can even reach beyond 100 MHz if high-speed electronic devices are adopted. Further optimization of the system will broaden its applications in diverse technological fields. (C) 2007 American Institute of Physics.

引用

页数：3

共 27 条

[11] Development of low noise cantilever deflection sensor for multienvironment frequency-modulation atomic force microscopy [J].